Inventor · disambiguated record
Chang-Wook Oh
Also filed as: OH CHANG-WOOK
2 granted patents·34 citations·filing 1999–2000
62Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0168US6372042B1System for processing semiconductor wafers producing a downward laminar flow of clean air in front of baking unitsSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Apr 16, 2002·16 cites·10 claims
- 0246US6347990B1Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer areaSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Feb 19, 2002·18 cites·71 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →