Inventor · disambiguated record
Chang Suk Oh
Also filed as: OH CHANG SUK
6 granted patents·3 pending applications·24 citations·filing 2008–2024
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0181US8113141B2Apparatus for processing a substrateOH CHANG-SUK·Filed 2008·Granted Feb 14, 2012·13 cites·22 claims
- 0280US8113142B2Apparatus for processing a substrateOH CHANG-SUK·Filed 2008·Granted Feb 14, 2012·11 cites·19 claims
- 0362US2025218839A1Stocker device and substrate processing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0461US2024393705A1Substrate processing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0549US12124169B2Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the sameSEMES CO LTD·Filed 2021·Granted Oct 22, 2024·0 cites·12 claims
- 0648US2024157391A1Liquid supply unit and substrate treating apparatus including sameSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0747US12055866B2Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatusSEMES CO LTD·Filed 2021·Granted Aug 6, 2024·0 cites·17 claims
- 0846US8115142B2Plate, apparatus for adjusting temperature of substrate having the plate and apparatus for processing substrate having the plateOH CHANG-SUK·Filed 2008·Granted Feb 14, 2012·0 cites·20 claims
- 0945US11845090B2Nozzle apparatus, apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Granted Dec 19, 2023·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →