Inventor · disambiguated record
Choul-Gue Park
Also filed as: PARK CHOUL-GUE
5 granted patents·1 pending application·111 citations·filing 1997–2014
80Inventor score
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
6 records- 0182US6336846B1Chemical-mechanical polishing apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Jan 8, 2002·36 cites·7 claims
- 0278US6340405B2Etching apparatus for manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Jan 22, 2002·65 cites·17 claims
- 0372US9421662B2Polishing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Aug 23, 2016·3 cites·12 claims
- 0468US9669516B2Apparatus and method for surface treatment of objectsSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Jun 6, 2017·3 cites·14 claims
- 0550US6517421B2Polishing head of a chemical and mechanical polishing apparatus for polishing a waferSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Feb 11, 2003·4 cites·19 claims
- 0634US2003120366A1Semiconductor cleaning system and method of controlling the operation of the sameFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →