Inventor · disambiguated record
Chih-I Peng
Also filed as: PENG CHIH-I
9 granted patents·1 pending application·59 citations·filing 1999–2023
85Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4TAIWAN SEMICONDUCTOR MFG CO LTD3LIN KUO-YIN1PENG CHIH I1WU JIANN LIH1
Top patents by PatentIndex Score
10 records- 0188US10460926B2Method and apparatus for chemical mechanical polishing processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 29, 2019·4 cites·20 claims
- 0280US6394886B1Conformal disk holder for CMP pad conditionerTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted May 28, 2002·23 cites·20 claims
- 0379US12131897B2Method and system for chemical mechanical polishing processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 29, 2024·0 cites·20 claims
- 0474US11682552B2Apparatus for chemical mechanical polishing processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 20, 2023·1 cites·20 claims
- 0567US6857942B1Apparatus and method for pre-conditioning a conditioning discTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Feb 22, 2005·12 cites·20 claims
- 0656US10279311B2System and method for operating chemical mechanical polishing processPENG CHIH I·Filed 2012·Granted May 7, 2019·1 cites·20 claims
- 0754US6672950B2Contamination prevention system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 6, 2004·6 cites·19 claims
- 0844US6221199B1Apparatus and method for removing an adhesive bonded padTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Apr 24, 2001·12 cites·18 claims
- 0937US9937536B2Air purge cleaning for semiconductor polishing apparatusLIN KUO YIN·Filed 2012·Granted Apr 10, 2018·0 cites·20 claims
- 1034US2013210173A1Multiple Zone Temperature Control for CMPWU JIANN LIH·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →