Inventor · disambiguated record
Chang-Hun Shin
Also filed as: SHIN CHANG HUN
2 granted patents·6 pending applications·1 citations·filing 2014–2024
30Inventor score
Files withEUGENE TECHNOLOGY CO LTD8
Top patents by PatentIndex Score
8 records- 0165US2025154650A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 0261US2025163576A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 0358US2025137128A1Process gas supply device and substrate processing system having the sameEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 0457US2025066920A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 0556US2025034704A1Substrate processing apparatus and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2024·Application pending·0 cites
- 0655US9818604B2Method for depositing insulating film on recessed portion having high aspect ratioEUGENE TECHNOLOGY CO LTD·Filed 2015·Granted Nov 14, 2017·1 cites·16 claims
- 0755US2015176128A1Substrate Processing ApparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 0843US9312125B2Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Apr 12, 2016·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →