Inventor · disambiguated record
Choi Pheng Soo
Also filed as: SOO CHOI PHENG
3 granted patents·62 citations·filing 1999–1999
72Inventor score
Top patents by PatentIndex Score
3 records- 0165US6323125B1Simplified dual damascene process utilizing PPMSO as an insulator layerCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Nov 27, 2001·34 cites·22 claims
- 0253US6251798B1Formation of air gap structures for inter-metal dielectric applicationCHARTERED SEMICONDUCTOR MFG CO·Filed 1999·Granted Jun 26, 2001·21 cites·29 claims
- 0336US6221560B1Method to enhance global planarization of silicon oxide surface for IC device fabricationCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Apr 24, 2001·7 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →