Inventor · disambiguated record
Chun Pheng Tan
Also filed as: TAN CHUN PHENG
1 granted patent·1 pending application·24 citations·filing 2000–2024
42Inventor score
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2 records- 0171US6460404B1Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater toolCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Oct 8, 2002·24 cites·16 claims
- 0255US2025247651A1Mems device and method for manufacturing the sameAAC TECHNOLOGIES PTE LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →