Inventor · disambiguated record
Chiaki Terasawa
Also filed as: TERASAWA CHIAKI
25 granted patents·2 pending applications·508 citations·filing 1990–2009
97Inventor score
Files withCANON KK26
Top patents by PatentIndex Score
27 records- 0197US7239453B2Projection optical system and projection exposure apparatusCANON KK·Filed 2006·Granted Jul 3, 2007·33 cites·10 claims
- 0295US7092168B2Projection optical system and projection exposure apparatusCANON KK·Filed 2005·Granted Aug 15, 2006·36 cites·5 claims
- 0395US6995918B2Projection optical system and projection exposure apparatusCANON KK·Filed 2004·Granted Feb 7, 2006·60 cites·8 claims
- 0495US6829099B2Projection optical system and projection exposure apparatusCANON KK·Filed 2001·Granted Dec 7, 2004·55 cites·28 claims
- 0590US7075726B2Projection optical system and projection exposure apparatusCANON KK·Filed 2001·Granted Jul 11, 2006·34 cites·37 claims
- 0690US6995833B2Projection optical system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Feb 7, 2006·40 cites·35 claims
- 0788US6947210B2Catoptric projection optical system, exposure apparatus and device fabrication method using sameCANON KK·Filed 2003·Granted Sep 20, 2005·30 cites·5 claims
- 0884US7053986B2Projection optical system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted May 30, 2006·6 cites·8 claims
- 0974US6459534B1Projection optical system and projection exposure apparatus with the same, and device manufacturing methodCANON KK·Filed 2000·Granted Oct 1, 2002·17 cites·10 claims
- 1069US6860610B2Reflection type projection optical system, exposure apparatus and device fabrication method using the sameCANON KK·Filed 2003·Granted Mar 1, 2005·9 cites·19 claims
- 1169US5790316AZoom lensCANON KK·Filed 1995·Granted Aug 4, 1998·34 cites·11 claims
- 1269US5760967AZoom lensCANON KK·Filed 1994·Granted Jun 2, 1998·31 cites·20 claims
- 1368US7232233B2Catoptric reduction projection optical system and exposure apparatus using the sameCANON KK·Filed 2002·Granted Jun 19, 2007·11 cites·15 claims
- 1466US6867922B1Projection optical system and projection exposure apparatus using the sameCANON KK·Filed 2000·Granted Mar 15, 2005·10 cites·18 claims
- 1566US5136431AZoom lens of the internal focus typeCANON KK·Filed 1990·Granted Aug 4, 1992·28 cites·14 claims
- 1664US7253971B2Catadioptric projection optical system and exposure apparatus having the sameCANON KK·Filed 2005·Granted Aug 7, 2007·1 cites·26 claims
- 1763US6621555B1Projection optical system and projection exposure apparatus with the same, and device manufacturing methodCANON KK·Filed 2000·Granted Sep 16, 2003·8 cites·9 claims
- 1861US6084721AZoom lensCANON KK·Filed 1998·Granted Jul 4, 2000·24 cites·7 claims
- 1957US7130018B2Catoptric projection optical system, exposure apparatus and device fabrication methodCANON KK·Filed 2003·Granted Oct 31, 2006·5 cites·29 claims
- 2051US5583700AZoom lensCANON KK·Filed 1994·Granted Dec 10, 1996·14 cites·4 claims
- 2149US5191475AZoom lensCANON KK·Filed 1991·Granted Mar 2, 1993·14 cites·10 claims
- 2249US2010103394A1Reflection projection optical system, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 2347US7268952B2Catadioptric projection system, and exposure apparatus having the sameCANON KK·Filed 2005·Granted Sep 11, 2007·0 cites·13 claims
- 2442US7317571B2Catadioptric projection optical system, exposure apparatus having the same, device fabrication methodCANON KK·Filed 2005·Granted Jan 8, 2008·0 cites·7 claims
- 2541US7283294B2Catadioptric projection optical system, exposure apparatus having the same, device fabrication methodCANON KK·Filed 2005·Granted Oct 16, 2007·0 cites·5 claims
- 2641US5751497AZoom lensCANON KK·Filed 1996·Granted May 12, 1998·8 cites·4 claims
- 2737US2003147131A1Reflection type projection optical system, exposure apparatus and device fabrication method using the sameFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →