Inventor · disambiguated record
Chia-Shiun Tsai
Also filed as: TSAI CHIA S · TSAI CHIA-SHIUN
2 granted patents·268 citations·filing 1995–1998
70Inventor score
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0194US6440863B1Plasma etch method for forming patterned oxygen containing plasma etchable layerTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Aug 27, 2002·246 cites·15 claims
- 0252US5521121AOxygen plasma etch process post contact layer etch backTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted May 28, 1996·22 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →