Inventor · disambiguated record
Chia-Shia Tsai
Also filed as: TSAI CHIA-SHIA
3 granted patents·64 citations·filing 1999–2003
71Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0173US6297168B1Edge defect inhibited trench etch plasma etch methodTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Oct 2, 2001·18 cites·14 claims
- 0271US6211063B1Method to fabricate self-aligned dual damascene structuresTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Apr 3, 2001·44 cites·18 claims
- 0343US6995085B2Underlayer protection for the dual damascene etchingTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Feb 7, 2006·2 cites·36 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →