Inventor · disambiguated record
Chao-Tzung Tsai
Also filed as: TSAI CHAO-TZUNG
6 granted patents·1 pending application·65 citations·filing 2002–2019
79Inventor score
Top patents by PatentIndex Score
7 records- 0188US7301645B2In-situ critical dimension measurementTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Nov 27, 2007·14 cites·20 claims
- 0278US6878646B1Method to control critical dimension of a hard masked patternTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 12, 2005·39 cites·35 claims
- 0362US7339253B2Retrograde trench isolation structuresTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 4, 2008·12 cites·29 claims
- 0449US11183405B2Semiconductor manufacturing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 23, 2021·0 cites·20 claims
- 0547US10269599B2Semiconductor manufacturing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Apr 23, 2019·0 cites·20 claims
- 0640US2016035563A1Apparatus and method for processing semiconductor wafersTAIWAN SEMICONDUCTOR MFG·Filed 2014·Application pending·0 cites
- 0735US6962878B2Method to reduce photoresist mask line dimensionsTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Nov 8, 2005·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →