Inventor · disambiguated record
Chun-Ching Tsan
Also filed as: TSAN CHUN-CHING
8 granted patents·268 citations·filing 1998–2001
89Inventor score
Files withTAIWAN SEMICONDUCTOR MFG8
Top patents by PatentIndex Score
8 records- 0196US6136680AMethods to improve copper-fluorinated silica glass interconnectsTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Oct 24, 2000·133 cites·35 claims
- 0272US6584987B1Method for improved cleaning in HDP-CVD process with reduced NF3 usageTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jul 1, 2003·31 cites·9 claims
- 0369US6586347B1Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuitsTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jul 1, 2003·16 cites·32 claims
- 0469US6399522B1PE-silane oxide particle performance improvementTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jun 4, 2002·37 cites·16 claims
- 0560US6479881B2Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitryTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Nov 12, 2002·6 cites·2 claims
- 0658US6268274B1Low temperature process for forming inter-metal gap-filling insulating layers in silicon wafer integrated circuitryTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jul 31, 2001·19 cites·19 claims
- 0756US6407007B1Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layerTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jun 18, 2002·21 cites·18 claims
- 0851US6323141B1Method for forming anti-reflective coating layer with enhanced film thickness uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Nov 27, 2001·5 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →