Inventor · disambiguated record
Chia-Hsi Wang
Also filed as: WANG CHIA-HSI
12 granted patents·14 pending applications·1 citations·filing 2014–2025
82Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD26
Top patents by PatentIndex Score
26 records- 0182US12334319B2Physical vapor deposition (PVD) with target erosion profile monitoringTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 17, 2025·0 cites·20 claims
- 0282US2025299938A1Physical vapor deposition (pvd) with target erosion profile monitoringTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0381US2025366148A1Diffusion barrier layers in semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0481US2025361600A1Physical vapor deposition system and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0580US12180576B2PVD target design and semiconductor devices formed using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·20 claims
- 0679US2025092508A1Pvd target design and semiconductor devices formed using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0776US12094698B2Physical vapor deposition apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 0875US2025069934A1Adjustable wafer chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0975US2025132148A1Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1074US11688591B2Physical vapor deposition apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 27, 2023·0 cites·20 claims
- 1174US2023374654A1In situ and tunable deposition of a filmTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1273US12237159B2Deposition apparatus, deposition target structure, and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1373US12165898B2Adjustable wafer chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 10, 2024·0 cites·20 claims
- 1472US11462394B2Physical vapor deposition apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 4, 2022·1 cites·20 claims
- 1571US2025113587A1Diffusion Barrier Layers in Semiconductor DevicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1670US11725270B2PVD target design and semiconductor devices formed using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 15, 2023·0 cites·20 claims
- 1769US11823878B2Deposition apparatus, deposition target structure, and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 21, 2023·0 cites·13 claims
- 1869US2024271271A1Physical vapor deposition system and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1965US12198927B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 2063US2025290819A1Detection of chamber sealing leakageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2162US12359307B2In situ and tunable deposition of a filmTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 2260US2025357179A1Wafer chuck assemblyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2358US2025054796A1Integrated load port first aid platformTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2454US2025167037A1Wafer chuck assemblyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2551US2023335423A1Multi-chamber semiconductor processing system with transfer robot temperature adjustmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 2648US10113228B2Method for controlling semiconductor deposition operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 30, 2018·0 cites·19 claims
Join the waitlist — get patent alerts
Get an alert when Chia-Hsi Wang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →