Inventor · disambiguated record
Chester Wasik
Also filed as: WASIK CHESTER · WASIK CHESTER A
5 granted patents·1 pending application·162 citations·filing 1978–2004
83Inventor score
Files withIBM6
Top patents by PatentIndex Score
6 records- 0188US4367044ASitu rate and depth monitor for silicon etchingIBM·Filed 1980·Granted Jan 4, 1983·73 cites·22 claims
- 0288US4293224AOptical system and technique for unambiguous film thickness monitoringIBM·Filed 1978·Granted Oct 6, 1981·43 cites·10 claims
- 0377US5235626ASegmented mask and exposure system for x-ray lithographyIBM·Filed 1991·Granted Aug 10, 1993·32 cites·7 claims
- 0472US6683305B1Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beamIBM·Filed 2002·Granted Jan 27, 2004·11 cites·14 claims
- 0551US7094616B2High resolution cross-sectioning of polysilicon features with a dual beam toolIBM·Filed 2004·Granted Aug 22, 2006·3 cites·16 claims
- 0638US2005211896A1Pt coating initiated by indirect electron beam for resist contact hole metrologyIBM·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →