Inventor · disambiguated record
Chi Yang
Also filed as: YANG CHI · YANG CHI-LUNG
6 granted patents·3 pending applications·10 citations·filing 2002–2025
74Inventor score
Top patents by PatentIndex Score
9 records- 0184US2025348005A1Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0283US10955762B2Radiation source apparatus and method for decreasing debris in radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 23, 2021·1 cites·20 claims
- 0381US12449734B2Lithography apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 0471US11333983B2Light source, EUV lithography system, and method for generating EUV radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 17, 2022·0 cites·20 claims
- 0565US11071191B2Extreme ultraviolet radiation source and cleaning method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 20, 2021·0 cites·20 claims
- 0661US10824083B2Light source, EUV lithography system, and method for generating EUV radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 3, 2020·0 cites·20 claims
- 0756US6676770B2Apparatus and method for removing particles from wafer podsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 13, 2004·9 cites·20 claims
- 0843US2020057376A1Lithography system and lithography methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Application pending·0 cites
- 0939US2008216600A1Hub controllerCHEN CHING-TING·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →