Inventor · disambiguated record

Chang Chu Yao

Also filed as: YAO CHANG-CHU

2 granted patents·16 citations·filing 1996–1997

58Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG2

Top patents by PatentIndex Score

2 records

0142US6019849AMethod and apparatus for automatic purge of HMDS vapor pipingTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Feb 1, 2000·11 cites·10 claims
0232US5763006AMethod and apparatus for automatic purge of HMDS vapor pipingTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 9, 1998·5 cites·8 claims

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