Inventor · disambiguated record
Cheng-Han Yeh
Also filed as: YEH CHENG-HAN
2 granted patents·1 pending application·4 citations·filing 2021–2024
51Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD3
Top patents by PatentIndex Score
3 records- 0191US11681235B2System and method for cleaning an EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 20, 2023·3 cites·20 claims
- 0286US12099310B2System and method for cleaning an EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 24, 2024·1 cites·20 claims
- 0371US2024377766A1System and method for cleaning an euv maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →