Inventor · disambiguated record
Chin-Teh Yeh
Also filed as: YEH CHIN-TEH
4 granted patents·15 citations·filing 1999–2000
69Inventor score
Top patents by PatentIndex Score
4 records- 0154US6507389B1Photolithography system having a frequency domain filtering maskPROMOS TECHNOLOGIES INC·Filed 2000·Granted Jan 14, 2003·8 cites·20 claims
- 0252US6441883B1Method and apparatus to reduce bias between dense and sparse photoresist patternsPROMOS TECHNOLOGIES INC·Filed 2000·Granted Aug 27, 2002·5 cites·10 claims
- 0327US6242137B1Method to uni-directionally expand bandwidth of an asymmetric optical systemPROMOS TECHNOLOGY INC·Filed 1999·Granted Jun 5, 2001·2 cites·18 claims
- 0424US6498644B1Alignment system of wafer stagePROMOS TECHNOLOGIES INC·Filed 1999·Granted Dec 24, 2002·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →