Inventor · disambiguated record
Chu-Tsao Yen
Also filed as: YEN CHU-TSAO
6 granted patents·225 citations·filing 1995–1999
86Inventor score
Files withINTEGRATED DEVICE TECH6
Top patents by PatentIndex Score
6 records- 0183US5981356AIsolation trenches with protected cornersINTEGRATED DEVICE TECH·Filed 1997·Granted Nov 9, 1999·76 cites·18 claims
- 0279US6025260AMethod for fabricating air gap with borderless contactINTEGRATED DEVICE TECH·Filed 1998·Granted Feb 15, 2000·51 cites·6 claims
- 0374US6136687AMethod of forming air gaps for reducing interconnect capacitanceINTEGRATED DEVICE TECH·Filed 1997·Granted Oct 24, 2000·51 cites·14 claims
- 0455US5911108AMethod for protecting an alignment mark on a semiconductor substrate during chemical mechanical polishing and the resulting structureINTEGRATED DEVICE TECH·Filed 1997·Granted Jun 8, 1999·22 cites·15 claims
- 0549US6232647B1Air gap with borderless contactINTEGRATED DEVICE TECH·Filed 1999·Granted May 15, 2001·13 cites·10 claims
- 0644US5789314AMethod of topside and inter-metal oxide coatingINTEGRATED DEVICE TECH·Filed 1995·Granted Aug 4, 1998·12 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →