Inventor · disambiguated record

Chi Kug Yoon

Also filed as: YOON CHI KUG

1 granted patent·2 pending applications·16 citations·filing 2009–2014

37Inventor score

Technology areasH10P

Files withCHARM ENGINEERING CO LTD3

Top patents by PatentIndex Score

3 records

0181US8373086B2Plasma processing apparatus and method for plasma processingCHARM ENGINEERING CO LTD·Filed 2009·Granted Feb 12, 2013·16 cites·20 claims
0247US2011049100A1Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the sameCHARM ENGINEERING CO LTD·Filed 2009·Application pending·0 cites
0346US2014332498A1Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the sameCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →