Inventor · disambiguated record
Chang Yu
Also filed as: YU CHANG · YU CHANG-HO
15 granted patents·1 pending application·1,032 citations·filing 1990–2023
95Inventor score
Top patents by PatentIndex Score
16 records- 0193US5202278AMethod of forming a capacitor in semiconductor wafer processingMICRON TECHNOLOGY INC·Filed 1991·Granted Apr 13, 1993·126 cites·24 claims
- 0293US5032233AMethod for improving step coverage of a metallization layer on an integrated circuit by use of a high melting point metal as an anti-reflective coating during laser planarizationMICRON TECHNOLOGY INC·Filed 1990·Granted Jul 16, 1991·181 cites·10 claims
- 0391US5173441ALaser ablation deposition process for semiconductor manufactureMICRON TECHNOLOGY INC·Filed 1991·Granted Dec 22, 1992·166 cites·24 claims
- 0488US5236865AMethod for simultaneously forming silicide and effecting dopant activation on a semiconductor waferMICRON TECHNOLOGY INC·Filed 1992·Granted Aug 17, 1993·123 cites·6 claims
- 0587US5124780AConductive contact plug and a method of forming a conductive contact plug in an integrated circuit using laser planarizationMICRON TECHNOLOGY INC·Filed 1991·Granted Jun 23, 1992·107 cites·46 claims
- 0686US5147819ASemiconductor metallization methodMICRON TECHNOLOGY INC·Filed 1991·Granted Sep 15, 1992·99 cites·4 claims
- 0783US5094977AStress reduction in metal films by laser annealingMICRON TECHNOLOGY INC·Filed 1991·Granted Mar 10, 1992·55 cites·14 claims
- 0877US5380678ABilayer barrier metal method for obtaining 100% step-coverage in contact vias without junction degradationFiled 1991·Granted Jan 10, 1995·60 cites·14 claims
- 0964US12134087B2Method for preparing pickering miniemulsion and its catalytic applicationUNIV DALIAN TECH·Filed 2023·Granted Nov 5, 2024·0 cites·8 claims
- 1063US5139974ASemiconductor manufacturing process for decreasing the optical refelctivity of a metal layerMICRON TECHNOLOGY INC·Filed 1991·Granted Aug 18, 1992·36 cites·13 claims
- 1159US10450669B2Container for silicon ingot fabrication and manufacturing method thereof, and method for manufacturing crystalline silicon ingotAUO CRYSTAL CORP·Filed 2017·Granted Oct 22, 2019·0 cites·10 claims
- 1257US2023064070A1Semiconductor processing equipment part and method for making the sameAUO CRYSTAL CORP·Filed 2021·Application pending·0 cites
- 1354US5066611AMethod for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coatingMICRON TECHNOLOGY INC·Filed 1990·Granted Nov 19, 1991·28 cites·6 claims
- 1453US5085080ATemperature and pressure measuring technique using the photoacoustic effect and mechanical resonanceMICRON TECHNOLOGY INC·Filed 1990·Granted Feb 4, 1992·20 cites·6 claims
- 1551US5139967AProcess for planarizing insulating dielectric materialMICRON TECHNOLOGY INC·Filed 1991·Granted Aug 18, 1992·22 cites·1 claims
- 1636US5106779AMethod for widening the laser planarization process window for metalized films on semiconductor wafersMICRON TECHNOLOGY INC·Filed 1990·Granted Apr 21, 1992·9 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →