Inventor · disambiguated record
Ching-Fang Yu
Also filed as: YU CHING-FANG
18 granted patents·9 pending applications·158 citations·filing 2005–2025
92Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD17TAIWAN SEMICONDUCTOR MFG3UNIV TSINGHUA2YU CHING-FANG2IND TECH RES INST1
Top patents by PatentIndex Score
27 records- 0197US8691476B2EUV mask and method for forming the sameYU CHING-FANG·Filed 2011·Granted Apr 8, 2014·128 cites·20 claims
- 0289US11815804B2EUV mask blank and method of making EUV mask blankTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 14, 2023·1 cites·20 claims
- 0388US8980108B1Method for integrated circuit fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 17, 2015·7 cites·20 claims
- 0488US2025362584A1Lithography mask having high extinction coefficient absorber and related systems and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0588US2025362580A1Extreme ultraviolet mask with capping layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0686US9933699B2Pellicle aging estimation and particle removal from pellicle via acoustic wavesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 3, 2018·3 cites·20 claims
- 0785US9354510B2EUV mask and method for forming the sameTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted May 31, 2016·3 cites·20 claims
- 0885US2025362581A1Euv lithography mask blanks, euv masks and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0983US12265322B2EUV mask blank and method of making EUV mask blankTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 1, 2025·0 cites·20 claims
- 1083US10126644B2Pellicle for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 13, 2018·2 cites·20 claims
- 1180US2025123552A1Lithography mask having high extinction coefficient absorber and related systems and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1277US2025216764A1Euv lithography mask blanks, euv masks and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1376US11150269B2Probe head for high frequency signal test and medium or low frequency signal test at the same timeMPI CORP·Filed 2020·Granted Oct 19, 2021·1 cites·18 claims
- 1475US2025355344A1Lithography mask having overlay mark and related methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1571US2023161241A1Extreme ultraviolet mask with capping layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 1670US12429776B2Lithography method with reduced impacts of mask defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 30, 2025·0 cites·20 claims
- 1770US2025383595A1Euv photomasks and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1869US9305346B2Method and apparatus for efficient defect inspectionYU CHING-FANG·Filed 2012·Granted Apr 5, 2016·3 cites·14 claims
- 1969US9152035B2Lithographic photomask with inclined sidesTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 6, 2015·1 cites·20 claims
- 2069US2025060660A1Lithography mask having overlay mark and related methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2167US9548209B2Method for integrated circuit fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 17, 2017·1 cites·19 claims
- 2264US8737717B2Method and apparatus for defect identificationLIN MEI-CHUN·Filed 2012·Granted May 27, 2014·3 cites·20 claims
- 2363US10691017B2Pellicle for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 23, 2020·0 cites·20 claims
- 2461US7394335B2Polarized high-order mode electromagnetic wave coupler and its coupling methodUNIV TSINGHUA·Filed 2005·Granted Jul 1, 2008·3 cites·13 claims
- 2559US10955746B2Lithography method with reduced impacts of mask defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·20 claims
- 2658US7369011B2High order mode electromagnetic wave coupler and coupling method using proportional distributing wavesUNIV TSINGHUA·Filed 2006·Granted May 6, 2008·2 cites·6 claims
- 2740US7381932B2Quasi-optical material treatment apparatusIND TECH RES INST·Filed 2005·Granted Jun 3, 2008·0 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Ching-Fang Yu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →