Inventor · disambiguated record
Chris C. Yu
Also filed as: YU CHRIS · YU CHRIS C · YU CHRIS CHANG
68 granted patents·17 pending applications·4,378 citations·filing 1991–2021
99Inventor score
Files withMICRON TECHNOLOGY INC24ANPAC BIO MEDICAL SCIENCE CO LTD17MOTOROLA INC10YU CHRIS C9SEMICONDUCTOR MFG INT SHANGHAI4
Top patents by PatentIndex Score
85 records- 0198US5244534ATwo-step chemical mechanical polishing process for producing flush and protruding tungsten plugsMICRON TECHNOLOGY INC·Filed 1992·Granted Sep 14, 1993·396 cites·23 claims
- 0298US5240552AChemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detectionMICRON TECHNOLOGY INC·Filed 1991·Granted Aug 31, 1993·472 cites·10 claims
- 0398US5232549ASpacers for field emission display fabricated via self-aligned high energy ablationMICRON TECHNOLOGY INC·Filed 1992·Granted Aug 3, 1993·229 cites·22 claims
- 0498US5222329AAcoustical method and system for detecting and controlling chemical-mechanical polishing (CMP) depths into layers of conductors, semiconductors, and dielectric materialsMICRON TECHNOLOGY INC·Filed 1992·Granted Jun 29, 1993·250 cites·13 claims
- 0597US5868896AChemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafersMICRON TECHNOLOGY INC·Filed 1996·Granted Feb 9, 1999·236 cites·19 claims
- 0697US5329734APolishing pads used to chemical-mechanical polish a semiconductor substrateMOTOROLA INC·Filed 1993·Granted Jul 19, 1994·168 cites·27 claims
- 0797US5225034AMethod of chemical mechanical polishing predominantly copper containing metal layers in semiconductor processingMICRON TECHNOLOGY INC·Filed 1992·Granted Jul 6, 1993·271 cites·8 claims
- 0896US5618381AMultiple step method of chemical-mechanical polishing which minimizes dishingMICRON TECHNOLOGY INC·Filed 1993·Granted Apr 8, 1997·315 cites·11 claims
- 0996US5354490ASlurries for chemical mechanically polishing copper containing metal layersMICRON TECHNOLOGY INC·Filed 1993·Granted Oct 11, 1994·235 cites·4 claims
- 1095US5435772AMethod of polishing a semiconductor substrateMOTOROLA INC·Filed 1993·Granted Jul 25, 1995·92 cites·6 claims
- 1195US5209816AMethod of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishingMICRON TECHNOLOGY INC·Filed 1992·Granted May 11, 1993·268 cites·17 claims
- 1294US9823209B2Micro-devices for disease detectionYU CHRIS CHANG·Filed 2011·Granted Nov 21, 2017·16 cites·29 claims
- 1394US6143123AChemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafersMICRON TECHNOLOGY INC·Filed 1999·Granted Nov 7, 2000·139 cites·21 claims
- 1494US5441598APolishing pad for chemical-mechanical polishing of a semiconductor substrateMOTOROLA INC·Filed 1993·Granted Aug 15, 1995·96 cites·19 claims
- 1594US5399234AAcoustically regulated polishing processMOTOROLA INC·Filed 1993·Granted Mar 21, 1995·114 cites·5 claims
- 1694US5314843AIntegrated circuit polishing methodMICRON TECHNOLOGY INC·Filed 1992·Granted May 24, 1994·206 cites·23 claims
- 1791US10012651B2Apparatus for detecting tumor cellsANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2016·Granted Jul 3, 2018·3 cites·37 claims
- 1891US5681423ASemiconductor wafer for improved chemical-mechanical polishing over large area featuresMICRON TECHNOLOGY INC·Filed 1996·Granted Oct 28, 1997·82 cites·5 claims
- 1990US10895573B2Apparatus for detecting tumor cellsANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2018·Granted Jan 19, 2021·2 cites·38 claims
- 2089US5525191AProcess for polishing a semiconductor substrateMOTOROLA INC·Filed 1994·Granted Jun 11, 1996·58 cites·13 claims
- 2189US5300155AIC chemical mechanical planarization process incorporating slurry temperature controlMICRON SEMICONDUCTOR INC·Filed 1992·Granted Apr 5, 1994·116 cites·6 claims
- 2288US6171952B1Methods of forming metallization layers and integrated circuits containing suchMICRON TECHNOLOGY INC·Filed 2000·Granted Jan 9, 2001·32 cites·35 claims
- 2388US5662788AMethod for forming a metallization layerMICRON TECHNOLOGY INC·Filed 1996·Granted Sep 2, 1997·73 cites·15 claims
- 2488US5628862APolishing pad for chemical-mechanical polishing of a semiconductor substrateMOTOROLA INC·Filed 1995·Granted May 13, 1997·68 cites·20 claims
- 2588US5531861AChemical-mechanical-polishing pad cleaning process for use during the fabrication of semiconductor devicesMOTOROLA INC·Filed 1995·Granted Jul 2, 1996·111 cites·12 claims
- 2687US10690613B2Micro-devices for disease detectionANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2017·Granted Jun 23, 2020·2 cites·18 claims
- 2787US9689863B2Micro-devices for improved disease detectionCHANG HE BIO-MEDICAL SCIENCE (YANGZHOU) CO LTD·Filed 2013·Granted Jun 27, 2017·15 cites·75 claims
- 2885US5769699APolishing pad for chemical-mechanical polishing of a semiconductor substrateMOTOROLA INC·Filed 1995·Granted Jun 23, 1998·54 cites·7 claims
- 2984US10126291B2Apparatus for disease detectionYU CHRIS C·Filed 2013·Granted Nov 13, 2018·8 cites·103 claims
- 3084US9408565B2Apparatus for detecting tumor cellsYU CHRIS C·Filed 2012·Granted Aug 9, 2016·3 cites·48 claims
- 3184US7052373B1Systems and slurries for chemical mechanical polishingANJI MICROELECTRONICS CO LTD·Filed 2005·Granted May 30, 2006·16 cites·20 claims
- 3283US9651542B2Micro-devices for disease detectionYU CHRIS CHANG·Filed 2012·Granted May 16, 2017·7 cites·19 claims
- 3383US6458015B1Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafersMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 1, 2002·18 cites·33 claims
- 3482US10345307B2Devices for detecting or filtering tumor cellsANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2016·Granted Jul 9, 2019·1 cites·12 claims
- 3582US10295541B2Devices for detecting or filtering tumor cellsSHANGHAI XINSHENPAI TECH CO LTD·Filed 2017·Granted May 21, 2019·1 cites·10 claims
- 3682US10067122B2Micro-devices for improved disease detectionSHANGHAI XINSHENPAI TECH CO LTD·Filed 2017·Granted Sep 4, 2018·2 cites·9 claims
- 3782US9655552B2Devices for detecting or filtering tumor cellsYU CHRIS C·Filed 2013·Granted May 23, 2017·2 cites·5 claims
- 3881US11085923B2Micro-devices for disease detectionANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2017·Granted Aug 10, 2021·1 cites·14 claims
- 3975US10161927B2Apparatus for disease detectionYU CHRIS C·Filed 2011·Granted Dec 25, 2018·7 cites·63 claims
- 4074US6753254B2Method for forming a metallization layerMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 22, 2004·11 cites·30 claims
- 4174US5270263AProcess for depositing aluminum nitride (AlN) using nitrogen plasma sputteringMICRON TECHNOLOGY INC·Filed 1991·Granted Dec 14, 1993·56 cites·8 claims
- 4274US2021364511A1Micro-devices for disease detection and treatmentANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2021·Application pending·0 cites
- 4373US2019277849A1Devices for Detecting or Filtering Tumor CellsANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2019·Application pending·0 cites
- 4472US10105317B2Method of drug deliveryYU CHRIS C·Filed 2009·Granted Oct 23, 2018·1 cites·32 claims
- 4572US10012642B2Methods and apparatus for enhanced detection of diseasesANPAC BIO MEDICAL SCIENCE LISHUI CO LTD·Filed 2014·Granted Jul 3, 2018·2 cites·22 claims
- 4672US7241692B2Method and structure for aluminum chemical mechanical polishing and protective layerSEMICONDUCTOR MFG INT SHANGHAI·Filed 2005·Granted Jul 10, 2007·6 cites·17 claims
- 4768US6633084B1Semiconductor wafer for improved chemical-mechanical polishing over large area featuresMICRON TECHNOLOGY INC·Filed 1999·Granted Oct 14, 2003·24 cites·21 claims
- 4867US8828246B2Method of fabricating micro-devicesYU CHRIS·Filed 2010·Granted Sep 9, 2014·1 cites·41 claims
- 4966US10802014B2Apparatus for improved disease detectionANPAC BIO MEDICAL SCIENCE SHANGHAI CO LTD·Filed 2014·Granted Oct 13, 2020·2 cites·46 claims
- 5065US11275048B2Micro-devices for disease detectionANPAC BIO MEDICAL SCIENCE CO LTD·Filed 2017·Granted Mar 15, 2022·0 cites·3 claims
Showing the top 50 of 85 patent records by PatentIndex Score.
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