Inventor · disambiguated record

Chorng-Tao Yu

Also filed as: YU CHORNG-TAO

3 granted patents·305 citations·filing 1986–1990

78Inventor score

Technology areasC30B H10P

Files withSILICON VALLEY GROUP1 TAMARACK SCIENT CO INC1 THERMCO SYSTEMS INC1

Top patents by PatentIndex Score

3 records

0188US5131752AMethod for film thickness endpoint controlTAMARACK SCIENT CO INC·Filed 1990·Granted Jul 21, 1992·224 cites·37 claims
0285US4886954AHot wall diffusion furnace and method for operating the furnaceSILICON VALLEY GROUP·Filed 1988·Granted Dec 12, 1989·53 cites·10 claims
0377US4711989ADiffusion furnace multizone temperature controlTHERMCO SYSTEMS INC·Filed 1986·Granted Dec 8, 1987·28 cites·6 claims

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