Inventor · disambiguated record

Chen-Cheng Yung

Also filed as: YUNG CHEN-CHENG

0 granted patents·2 pending applications·0 citations·filing 2002–2002

Technology areasG01N G03F

Top patents by PatentIndex Score

2 records

0117US2003211411A1Method for monitoring focus in lithographyFiled 2002·Application pending·0 cites
0210US2003232283A1Method for forming a photoresist pattern on a semiconductor substrateFiled 2002·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →