Inventor · disambiguated record
David M. Burtner
Also filed as: BURTNER DAVID · BURTNER DAVID M · BURTNER DAVID MATTHEW
11 granted patents·1 pending application·79 citations·filing 2004–2025
90Inventor score
Technology areasH01J
Top patents by PatentIndex Score
12 records- 0184US7853364B2Adaptive controller for ion sourceVEECO INSTR INC·Filed 2007·Granted Dec 14, 2010·12 cites·40 claims
- 0284US7476869B2Gas distributor for ion sourceVEECO INSTR INC·Filed 2007·Granted Jan 13, 2009·9 cites·25 claims
- 0384US7439521B2Ion source with removable anode assemblyVEECO INSTR INC·Filed 2007·Granted Oct 21, 2008·9 cites·28 claims
- 0484US7342236B2Fluid-cooled ion sourceVEECO INSTR INC·Filed 2005·Granted Mar 11, 2008·8 cites·29 claims
- 0579US6919690B2Modular uniform gas distribution system in an ion sourceVEECO INSTR INC·Filed 2004·Granted Jul 19, 2005·16 cites·22 claims
- 0677US7425711B2Thermal control plate for ion sourceVEECO INSTR INC·Filed 2007·Granted Sep 16, 2008·5 cites·28 claims
- 0773US7566883B2Thermal transfer sheet for ion sourceVEECO INSTR INC·Filed 2007·Granted Jul 28, 2009·3 cites·21 claims
- 0871US7914603B2Particle trap for a plasma sourceMKS INSTR INC·Filed 2008·Granted Mar 29, 2011·2 cites·56 claims
- 0965US7425709B2Modular ion sourceVEECO INSTR INC·Filed 2004·Granted Sep 16, 2008·6 cites·39 claims
- 1065US6984942B2Longitudinal cathode expansion in an ion sourceVEECO INSTR INC·Filed 2004·Granted Jan 10, 2006·6 cites·16 claims
- 1163US2025299907A1Liner with raised ribs for particle transport reductionAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 1257US7718983B2Sputtered contamination shielding for an ion sourceVEECO INSTR INC·Filed 2004·Granted May 18, 2010·3 cites·50 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →