Inventor · disambiguated record
Daniel E. Engelhard
Also filed as: ENGELHARD DANIEL E · ENGELHARD DANIEL EDWARD
3 granted patents·39 citations·filing 2003–2014
68Inventor score
Top patents by PatentIndex Score
3 records- 0184US6791679B2Adaptive correlation of pattern resist structures using optical metrologyTIMBRE TECH INC·Filed 2003·Granted Sep 14, 2004·32 cites·37 claims
- 0262US9146193B2Scatterometry metrology methods and methods of modeling formation of a vertical region of a multilayer semiconductor substrate to comprise a scatterometry targetMICRON TECHNOLOGY INC·Filed 2014·Granted Sep 29, 2015·1 cites·35 claims
- 0358US7440881B2Adaptive correlation of pattern resist structures using optical metrologyTIMBRE TECH INC·Filed 2004·Granted Oct 21, 2008·6 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →