Inventor · disambiguated record
David Hammerich
Also filed as: HAMMERICH DAVID · HAMMERICH DAVID R
3 granted patents·2 citations·filing 2013–2016
50Inventor score
Files withFM IND INC3
Top patents by PatentIndex Score
3 records- 0180US10388492B2Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings thereforFM IND INC·Filed 2016·Granted Aug 20, 2019·2 cites·15 claims
- 0257US9790581B2Emissivity controlled coatings for semiconductor chamber componentsFM IND INC·Filed 2014·Granted Oct 17, 2017·0 cites·23 claims
- 0336US9543183B2Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing sameFM IND INC·Filed 2013·Granted Jan 10, 2017·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →