Inventor · disambiguated record

Daan Willem Theresia Hennekens

Also filed as: HENNEKENS DAAN WILLEM THERESIA

1 granted patent·2 citations·filing 2010–2010

18Inventor score

Technology areasG03B

Files withHEERTJES MARCEL FRANCOIS1

Top patents by PatentIndex Score

1 record

0157US8675179B2Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable objectHEERTJES MARCEL FRANCOIS·Filed 2010·Granted Mar 18, 2014·2 cites·24 claims

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