Inventor · disambiguated record
Dale L. Hetherington
Also filed as: HETHERINGTON DALE L
5 granted patents·639 citations·filing 1996–2004
87Inventor score
Files withSANDIA CORP5
Top patents by PatentIndex Score
5 records- 0196US5919548AChemical-mechanical polishing of recessed microelectromechanical devicesSANDIA CORP·Filed 1997·Granted Jul 6, 1999·269 cites·42 claims
- 0294US5998298AUse of chemical-mechanical polishing for fabricating photonic bandgap structuresSANDIA CORP·Filed 1998·Granted Dec 7, 1999·166 cites·47 claims
- 0394US5804084AUse of chemical mechanical polishing in micromachiningSANDIA CORP·Filed 1996·Granted Sep 8, 1998·125 cites·15 claims
- 0484US6808952B1Process for fabricating a microelectromechanical structureSANDIA CORP·Filed 2002·Granted Oct 26, 2004·44 cites·36 claims
- 0580US7004198B1Micro-fluidic interconnectSANDIA CORP·Filed 2004·Granted Feb 28, 2006·35 cites·76 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →