Inventor · disambiguated record
David W. Kinnard
Also filed as: KINNARD DAVID W · KINNARD DAVID WILLIAM
10 granted patents·925 citations·filing 1998–2015
92Inventor score
Top patents by PatentIndex Score
10 records- 0197US6635117B1Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing systemAXCELIS TECH INC·Filed 2000·Granted Oct 21, 2003·609 cites·9 claims
- 0294US6782843B2Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing systemAXCELIS TECH INC·Filed 2003·Granted Aug 31, 2004·68 cites·14 claims
- 0394US6537419B1Gas distribution plate assembly for providing laminar gas flow across the surface of a substrateFiled 2000·Granted Mar 25, 2003·70 cites·20 claims
- 0489US6663333B2Wafer transport apparatusAXCELIS TECH INC·Filed 2001·Granted Dec 16, 2003·44 cites·33 claims
- 0585US7163587B2Reactor assembly and processing methodAXCELIS TECH INC·Filed 2002·Granted Jan 16, 2007·33 cites·25 claims
- 0679US6877946B2Wafer transport apparatusAXCELIS TECH INC·Filed 2003·Granted Apr 12, 2005·19 cites·16 claims
- 0778US6259072B1Zone controlled radiant heating system utilizing focused reflectorAXCELIS TECH INC·Filed 1999·Granted Jul 10, 2001·58 cites·21 claims
- 0873US9847632B2Cable termination method and apparatusZIVI DANIEL F·Filed 2015·Granted Dec 19, 2017·4 cites·13 claims
- 0968US6969227B2Wafer transport apparatusAXCOLIS TECHNOLOGIES INC·Filed 2003·Granted Nov 29, 2005·12 cites·14 claims
- 1039US6040518AWafer temperature monitoring device utilizing flexible thermocoupleEATON CORP·Filed 1998·Granted Mar 21, 2000·8 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →