Inventor · disambiguated record
David A. Kirkwood
Also filed as: KIRKWOOD DAVID A · KIRKWOOD DAVID ALLEN
2 granted patents·3 citations·filing 2018–2018
39Inventor score
Files withAXCELIS TECH INC2
Top patents by PatentIndex Score
2 records- 0175US10689752B2Film stabilization through novel materials modification of beamline componentsAXCELIS TECH INC·Filed 2018·Granted Jun 23, 2020·3 cites·20 claims
- 0246US10580616B2System and method for in-situ beamline film stabilization or removal in the AEF regionAXCELIS TECH INC·Filed 2018·Granted Mar 3, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →