Inventor · disambiguated record
David S. O'Grady
Also filed as: O'GRADY DAVID S · O'GRADY DAVID SHAWN
11 granted patents·510 citations·filing 1995–1999
92Inventor score
Files withIBM11
Top patents by PatentIndex Score
11 records- 0194US5807649ALithographic patterning method and mask set therefor with light field trim maskIBM·Filed 1996·Granted Sep 15, 1998·187 cites·20 claims
- 0290US5932377AExact transmission balanced alternating phase-shifting mask for photolithographyIBM·Filed 1998·Granted Aug 3, 1999·86 cites·22 claims
- 0389US5503951AAttenuating phase-shift mask structure and fabrication methodIBM·Filed 1995·Granted Apr 2, 1996·80 cites·18 claims
- 0473US5978501AAdaptive inspection method and systemIBM·Filed 1997·Granted Nov 2, 1999·64 cites·18 claims
- 0560US6110624AMultiple polarity mask exposure methodIBM·Filed 1999·Granted Aug 29, 2000·21 cites·39 claims
- 0651US6027837AMethod for tuning an attenuating phase shift maskIBM·Filed 1999·Granted Feb 22, 2000·11 cites·28 claims
- 0749US5484672AMethod of making a rim-type phase-shift maskIBM·Filed 1995·Granted Jan 16, 1996·21 cites·16 claims
- 0848US5506080ALithographic mask repair and fabrication methodIBM·Filed 1995·Granted Apr 9, 1996·19 cites·13 claims
- 0947US6277527B1Method of making a twin alternating phase shift maskIBM·Filed 1999·Granted Aug 21, 2001·10 cites·22 claims
- 1041US6110623ASurface coating method to highlight transparent mask defectsIBM·Filed 1999·Granted Aug 29, 2000·8 cites·18 claims
- 1135US6165651AApparatus for tuning an attenuating phase shift maskIBM·Filed 1999·Granted Dec 26, 2000·3 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →