Inventor · disambiguated record
Daeun Son
Also filed as: SON DAEUN
1 granted patent·1 pending application·0 citations·filing 2023–2023
6Inventor score
Technology areasH01J
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0162US12381070B2Substrate treatment apparatus and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Aug 5, 2025·0 cites·20 claims
- 0257US2024128055A1Apparatus for processing plasma and method of processing plasma and manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →