Inventor · disambiguated record
Daniel Stearns
Also filed as: STEARNS DANIEL · STEARNS DANIEL S
6 granted patents·45 citations·filing 1987–2014
77Inventor score
Top patents by PatentIndex Score
6 records- 0178US8895946B2Source-collector modules for EUV lithography employing a GIC mirror and a LPP sourceMEDIA LARIO SRL·Filed 2013·Granted Nov 25, 2014·7 cites·19 claims
- 0278US4870648AX-ray beamsplitterUS ENERGY·Filed 1987·Granted Sep 26, 1989·35 cites·25 claims
- 0361US8746975B2Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithographyBIANUCCI GIOVANNI·Filed 2012·Granted Jun 10, 2014·2 cites·26 claims
- 0458US9609731B2Systems and methods for synchronous operation of debris-mitigation devicesMEDIA LARIO SRL·Filed 2014·Granted Mar 28, 2017·1 cites·9 claims
- 0546US9585236B2Sn vapor EUV LLP source system for EUV lithographyMEDIA LARIO SRL·Filed 2014·Granted Feb 28, 2017·0 cites·19 claims
- 0638US8731139B2Evaporative thermal management of grazing incidence collectors for EUV lithographyGREK BORIS·Filed 2011·Granted May 20, 2014·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →