Inventor · disambiguated record
Da In Sung
Also filed as: SUNG DA IN
2 granted patents·1 pending application·0 citations·filing 2018–2023
22Inventor score
Files withRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV2DAEJEON UNIV INDUSTRY UNIV COOPERATION FOUNDATION1
Top patents by PatentIndex Score
3 records- 0147US2023395386A1Etching processing apparatus and etching processing methodDAEJEON UNIV INDUSTRY UNIV COOPERATION FOUNDATION·Filed 2023·Application pending·0 cites
- 0239US10784082B2Apparatus for generating plasma and apparatus for treating substrate having the sameRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2019·Granted Sep 22, 2020·0 cites·13 claims
- 0337US11120975B2Ion beam etching apparatusRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2018·Granted Sep 14, 2021·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →