Inventor · disambiguated record
Dennis M. Hayden
Also filed as: HAYDEN DENNIS M
8 granted patents·335 citations·filing 1997–2001
90Inventor score
Files withIBM8
Top patents by PatentIndex Score
8 records- 0196US6190836B1Methods for repair of photomasksIBM·Filed 2000·Granted Feb 20, 2001·75 cites·18 claims
- 0292US6165649AMethods for repair of photomasksIBM·Filed 1997·Granted Dec 26, 2000·70 cites·64 claims
- 0392US6090507AMethods for repair of photomasksIBM·Filed 1999·Granted Jul 18, 2000·76 cites·18 claims
- 0488US6156461AMethod for repair of photomasksIBM·Filed 2000·Granted Dec 5, 2000·26 cites·11 claims
- 0585US6346352B1Quartz defect removal utilizing gallium staining and femtosecond ablationIBM·Filed 2000·Granted Feb 12, 2002·49 cites·32 claims
- 0678US6534225B2Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift featuresIBM·Filed 2001·Granted Mar 18, 2003·17 cites·49 claims
- 0771US6515736B1Reticle capturing and handling systemIBM·Filed 2000·Granted Feb 4, 2003·11 cites·18 claims
- 0868US6582857B1Repair of masks to promote adhesion of patchesIBM·Filed 2000·Granted Jun 24, 2003·11 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →