Inventor · disambiguated record
Dennis Elliott Kamenitsa
Also filed as: KAMENITSA DENNIS E · Kamenitsa Dennis Elliott
3 granted patents·24 citations·filing 2005–2017
68Inventor score
Files withAXCELIS TECH INC3
Top patents by PatentIndex Score
3 records- 0188US7329882B2Ion implantation beam angle calibrationAXCELIS TECH INC·Filed 2005·Granted Feb 12, 2008·16 cites·21 claims
- 0285US10087520B2Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Oct 2, 2018·5 cites·20 claims
- 0379US10774419B2Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Sep 15, 2020·3 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →