Inventor · disambiguated record
Denis Rufin
Also filed as: RUFIN DENIS · RUFIN DENIS A
5 granted patents·199 citations·filing 1988–1989
83Inventor score
Top patents by PatentIndex Score
5 records- 0195US5001873AMethod and apparatus for in situ cleaning of excimer laser opticsAIR LIQUIDE AMERICAN·Filed 1989·Granted Mar 26, 1991·134 cites·15 claims
- 0281US4886444AProcess for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said processAIR LIQUIDE·Filed 1988·Granted Dec 12, 1989·39 cites·12 claims
- 0360US4872944AProcess for the control in real time of the selectivity of the etching by analysis of the plasma gases in a process of reactive ionic etching and a reactor thereforeAIR LIQUIDE·Filed 1988·Granted Oct 10, 1989·11 cites·9 claims
- 0442US5084080ADevice for trapping gaseous compounds of refractory metals and pumping plant including sameAIR LIQUIDE·Filed 1988·Granted Jan 28, 1992·12 cites·9 claims
- 0524US4981723AChemical vapor deposition of tungsten silicide using silicon sub-fluoridesAIR LIQUIDE·Filed 1988·Granted Jan 1, 1991·3 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →