Inventor · disambiguated record
Denis Shaw
Also filed as: SHAW DENIS · SHAW DENIS M
21 granted patents·5 pending applications·531 citations·filing 2003–2024
96Inventor score
Top patents by PatentIndex Score
26 records- 0198US11437221B2Spatial monitoring and control of plasma processing environmentsADVANCED ENERGY IND INC·Filed 2021·Granted Sep 6, 2022·16 cites·15 claims
- 0298US11282677B2Spatial monitoring and control of plasma processing environmentsADVANCED ENERGY IND INC·Filed 2020·Granted Mar 22, 2022·15 cites·17 claims
- 0398US11264209B2Application of modulating supplies in a plasma processing systemADVANCED ENERGY IND INC·Filed 2020·Granted Mar 1, 2022·13 cites·19 claims
- 0498US10896807B2Synchronization between an excitation source and a substrate bias supplyADVANCED ENERGY IND INC·Filed 2020·Granted Jan 19, 2021·58 cites·15 claims
- 0598US10811227B2Application of modulating supplies in a plasma processing systemADVANCED ENERGY IND INC·Filed 2018·Granted Oct 20, 2020·51 cites·31 claims
- 0698US10811228B2Control of plasma processing systems that include plasma modulating suppliesADVANCED ENERGY IND INC·Filed 2019·Granted Oct 20, 2020·57 cites·31 claims
- 0798US10811229B2Synchronization with a bias supply in a plasma processing systemADVANCED ENERGY IND INC·Filed 2019·Granted Oct 20, 2020·51 cites·13 claims
- 0898US10707055B2Spatial and temporal control of ion bias voltage for plasma processingADVANCED ENERGY IND INC·Filed 2018·Granted Jul 7, 2020·55 cites·23 claims
- 0998US10607813B2Synchronized pulsing of plasma processing source and substrate biasADVANCED ENERGY IND INC·Filed 2018·Granted Mar 31, 2020·104 cites·14 claims
- 1097US12142460B2Control of plasma sheath with bias suppliesADVANCED ENERGY IND INC·Filed 2023·Granted Nov 12, 2024·3 cites·20 claims
- 1196US11610761B2Synchronization between an excitation source and a substrate bias supplyADVANCED ENERGY IND INC·Filed 2021·Granted Mar 21, 2023·3 cites·21 claims
- 1296US9748076B1Apparatus for frequency tuning in a RF generatorADVANCED ENERGY IND INC·Filed 2016·Granted Aug 29, 2017·37 cites·18 claims
- 1395US12159767B2Spatial control of plasma processing environmentsADVANCED ENERGY IND INC·Filed 2022·Granted Dec 3, 2024·2 cites·20 claims
- 1495US10026595B2Apparatus for frequency tuning in a RF generatorADVANCED ENERGY IND INC·Filed 2017·Granted Jul 17, 2018·26 cites·16 claims
- 1591US11842884B2Spatial monitoring and control of plasma processing environmentsADVANCED ENERGY IND INC·Filed 2022·Granted Dec 12, 2023·1 cites·16 claims
- 1690US6812648B2Method of cleaning ion source, and corresponding apparatus/systemGUARDIAN INDUSTRIES·Filed 2003·Granted Nov 2, 2004·37 cites·18 claims
- 1787US2025166970A1Control of plasma sheath with bias suppliesADVANCED ENERGY IND INC·Filed 2024·Application pending·0 cites
- 1881US12176184B2Synchronization of bias suppliesADVANCED ENERGY IND INC·Filed 2023·Granted Dec 24, 2024·0 cites·9 claims
- 1976US12505986B2Synchronization of plasma processing componentsADVANCED ENERGY IND INC·Filed 2022·Granted Dec 23, 2025·0 cites·13 claims
- 2064US2025279268A1Plasma processing based on bias supply reportingADVANCED ENERGY IND INC·Filed 2024·Application pending·0 cites
- 2162US2025279260A1Plasma processing bias control based on impedanceADVANCED ENERGY IND INC·Filed 2024·Application pending·0 cites
- 2255US6911789B2Power supply for a hot-filament cathodeADVANCED ENERGY IND INC·Filed 2003·Granted Jun 28, 2005·2 cites·10 claims
- 2355US2025183006A1Match network with variable capacitance and switchable array of solid-state capacitanceADVANCED ENERGY IND INC·Filed 2023·Application pending·0 cites
- 2448US7942112B2Method and apparatus for preventing the formation of a plasma-inhibiting substanceADVANCED ENERGY IND INC·Filed 2006·Granted May 17, 2011·0 cites·7 claims
- 2547US2022139674A1Systems and methods combining match networks and frequency tuningADVANCED ENERGY IND INC·Filed 2021·Application pending·0 cites
- 2645US12009181B2Match efficiency-variation compensationADVANCED ENERGY IND INC·Filed 2021·Granted Jun 11, 2024·0 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when Denis Shaw files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →