Inventor · disambiguated record
Diana Perez
Also filed as: PEREZ DIANA
7 granted patents·69 citations·filing 1997–2004
84Inventor score
Top patents by PatentIndex Score
7 records- 0170US6132632AMethod and apparatus for achieving etch rate uniformity in a reactive ion etcherIBM·Filed 1997·Granted Oct 17, 2000·25 cites·8 claims
- 0261US7560225B2Method of forming uniform features using photoresistHITACHI GLOBAL STORAGE TECH·Filed 2003·Granted Jul 14, 2009·6 cites·8 claims
- 0357US6001268AReactive ion etching of alumina/TiC substratesIBM·Filed 1997·Granted Dec 14, 1999·17 cites·13 claims
- 0453US6027660AMethod of etching ceramics of alumina/TiC with high density plasmaIBM·Filed 1998·Granted Feb 22, 2000·12 cites·22 claims
- 0545US7481312B2Direct cooling pallet assembly for temperature stability for deep ion mill etch processHITACHI GLOBAL STORAGE TECH·Filed 2004·Granted Jan 27, 2009·2 cites·6 claims
- 0642US7296420B2Direct cooling pallet tray for temperature stability for deep ion mill etch processHITACHI GLOBAL STORAGE TECH·Filed 2004·Granted Nov 20, 2007·1 cites·27 claims
- 0741US6051099AApparatus for achieving etch rate uniformityIBM·Filed 1997·Granted Apr 18, 2000·6 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →