Inventor · disambiguated record
Douglas Brown
Also filed as: BROWN DOUGLAS · BROWN DOUGLAS A · BROWN DOUGLAS ALBERT
12 granted patents·3 pending applications·219 citations·filing 1996–2023
92Inventor score
Files withAXCELIS TECH INC8HENKEL CORP2ONTO INNOVATION INC2BLACK DUCK SOFTWARE INC1VARIAN SEMICONDUCTOR EQUIPMENT1
Top patents by PatentIndex Score
15 records- 0194US6998625B1Ion implanter having two-stage deceleration beamlineVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Feb 14, 2006·58 cites·57 claims
- 0284US6946403B2Method of making a MEMS electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Sep 20, 2005·32 cites·49 claims
- 0382US6695886B1Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP toolAXCELIS TECH INC·Filed 2002·Granted Feb 24, 2004·31 cites·27 claims
- 0481US6613387B2Protective reaction rinse for autodeposition coatingsHENKEL CORP·Filed 2001·Granted Sep 2, 2003·17 cites·42 claims
- 0577US6783630B2Segmented cold plate for rapid thermal processing (RTP) tool for conduction coolingAXCELIS TECH INC·Filed 2002·Granted Aug 31, 2004·22 cites·62 claims
- 0675US7267520B2Wafer scanning system with reciprocating rotary motion utilizing springs and counterweightsAXCELIS TECH INC·Filed 2005·Granted Sep 11, 2007·5 cites·22 claims
- 0770US6989545B1Device and method for measurement of beam angle and divergenceAXCELIS TECH INC·Filed 2004·Granted Jan 24, 2006·13 cites·25 claims
- 0868US7166187B2Segmented cold plate for rapid thermal processing (RTP) tool for conduction coolingAXCELIS TECH INC·Filed 2004·Granted Jan 23, 2007·12 cites·7 claims
- 0968US7072165B2MEMS based multi-polar electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Jul 4, 2006·11 cites·47 claims
- 1067US6905984B2MEMS based contact conductivity electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Jun 14, 2005·11 cites·26 claims
- 1158US2024319615A1Substrate edge patterning techniquesONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 1253US2023043353A1Multiple camera apparatus for photolithographic processingONTO INNOVATION INC·Filed 2021·Application pending·0 cites
- 1346US12406015B2Correlating open source component matching results using different scanning techniquesBLACK DUCK SOFTWARE INC·Filed 2022·Granted Sep 2, 2025·0 cites·17 claims
- 1439US5786030ASpotting resistant gloss enhancement of autodeposition coatingHENKEL CORP·Filed 1996·Granted Jul 28, 1998·7 cites·20 claims
- 1532US2004053514A1Apparatus for cooling a substrate through thermal conduction in the viscous regimeFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →