Inventor · disambiguated record
Doogyu Lee
Also filed as: LEE DOOGYU
4 granted patents·1 pending application·6 citations·filing 2020–2023
63Inventor score
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0193US11137673B1EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 5, 2021·4 cites·14 claims
- 0291US11422455B2EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 23, 2022·2 cites·10 claims
- 0354US11796923B2Overlay correction method, method of evaluating overlay correction operation, and method of fabricating semiconductor device using the overlay correction methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Oct 24, 2023·0 cites·20 claims
- 0454US2024152046A1Method of controlling semiconductor process and semiconductor processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0551US11526087B2Method of manufacturing a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 13, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →