Inventor · disambiguated record
Duk Hyun Son
Also filed as: SON DUK HYUN
9 granted patents·8 pending applications·18 citations·filing 2008–2024
77Inventor score
Top patents by PatentIndex Score
17 records- 0180US8113918B2Substrate supporting unit and single type substrate polishing apparatus using the sameKOO GYO-WOOG·Filed 2008·Granted Feb 14, 2012·18 cites·27 claims
- 0271US12400886B2Apparatus for transporting substrate and system for treating substrate with the apparatusSEMES CO LTD·Filed 2022·Granted Aug 26, 2025·0 cites·10 claims
- 0363US11569103B2Apparatus for transporting substrate and system for treating substrate with the apparatusSEMES CO LTD·Filed 2021·Granted Jan 31, 2023·0 cites·15 claims
- 0461US2025149312A1Substrate processing apparatus including fluid supply unit and fluid control method for controlling flow variability of fluidSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0558US12512305B2Plasma processing apparatus and plasma control method using magnetic fieldSEMES CO LTD·Filed 2023·Granted Dec 30, 2025·0 cites·15 claims
- 0658US2025029851A1Substrate processing system and process gas supply control verification methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0757US2024203696A1Substrate processing device and substrate processing methodSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0855US12340988B2Ring carrier and substrate treating systemSEMES CO LTD·Filed 2022·Granted Jun 24, 2025·0 cites·20 claims
- 0954US12198909B2Apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Jan 14, 2025·0 cites·18 claims
- 1052US2023317434A1Carrier for end effector, transportation apparatus including the same and the substrate processing apparatusSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1150US11534859B2Substrate treatment apparatusSEMES CO LTD·Filed 2021·Granted Dec 27, 2022·0 cites·5 claims
- 1247US2022108868A1Substrate treating apparatusSEMES CO LTD·Filed 2021·Application pending·0 cites
- 1343US12387950B2Transfer assembly and apparatus for treating a substrate with the transfer assemblySEMES CO LTD·Filed 2022·Granted Aug 12, 2025·0 cites·15 claims
- 1443US2020168442A1Focus ring height adjusting device and wafer etching apparatus including the sameSEMES CO LTD·Filed 2019·Application pending·0 cites
- 1541US11631606B2Substrate storage apparatus and apparatus for processing substrate using the sameSEMES CO LTD·Filed 2019·Granted Apr 18, 2023·0 cites·20 claims
- 1640US2020168496A1Substrate treatment apparatusSEMES CO LTD·Filed 2019·Application pending·0 cites
- 1732US2016027617A1Plasma generating unit and substrate treating apparatus having the sameSEMES CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →