Inventor · disambiguated record
Edward C. Eisner
Also filed as: EISNER EDWARD · EISNER EDWARD C
25 granted patents·5 pending applications·133 citations·filing 2005–2025
95Inventor score
Top patents by PatentIndex Score
30 records- 0194US7399980B2Systems and methods for beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2007·Granted Jul 15, 2008·20 cites·19 claims
- 0294US7227160B1Systems and methods for beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2006·Granted Jun 5, 2007·21 cites·20 claims
- 0390US10037877B1Ion implantation system having beam angle control in drift and deceleration modesAXCELIS TECH INC·Filed 2017·Granted Jul 31, 2018·6 cites·20 claims
- 0490US7615763B2System for magnetic scanning and correction of an ion beamAXCELIS TECH INC·Filed 2006·Granted Nov 10, 2009·16 cites·27 claims
- 0589US7589333B2Methods for rapidly switching off an ion beamAXCELIS TECH INC·Filed 2006·Granted Sep 15, 2009·12 cites·19 claims
- 0688US8637838B2System and method for ion implantation with improved productivity and uniformityEISNER EDWARD C·Filed 2011·Granted Jan 28, 2014·10 cites·20 claims
- 0785US9679739B2Combined electrostatic lens system for ion implantationAXCELIS TECH INC·Filed 2015·Granted Jun 13, 2017·4 cites·20 claims
- 0883US10553392B1Scan and corrector magnet designs for high throughput scanned beam ion implanterAXCELIS TECH INC·Filed 2018·Granted Feb 4, 2020·2 cites·20 claims
- 0983US7550751B2Ion beam scanning control methods and systems for ion implantation uniformityAXCELIS TECH INC·Filed 2007·Granted Jun 23, 2009·8 cites·19 claims
- 1078US11114270B2Scanning magnet design with enhanced efficiencyAXCELIS TECH INC·Filed 2018·Granted Sep 7, 2021·1 cites·20 claims
- 1177US7453074B2Ion implanter with ionization chamber electrode designAXCELIS TECH INC·Filed 2005·Granted Nov 18, 2008·4 cites·26 claims
- 1276US10483086B2Beam profiling speed enhancement for scanned beam implantersAXCELIS TECH INC·Filed 2015·Granted Nov 19, 2019·2 cites·17 claims
- 1376US8089052B2Ion source with adjustable apertureTIEGER DANIEL·Filed 2009·Granted Jan 3, 2012·6 cites·20 claims
- 1476US7566886B2Throughput enhancement for scanned beam ion implantersAXCELIS TECH INC·Filed 2006·Granted Jul 28, 2009·5 cites·29 claims
- 1575US8963107B2Beam line design to reduce energy contaminationEISNER EDWARD C·Filed 2012·Granted Feb 24, 2015·3 cites·18 claims
- 1675US8008636B2Ion implantation with diminished scanning field effectsAXCELIS TECH INC·Filed 2008·Granted Aug 30, 2011·3 cites·20 claims
- 1773US8168941B2Ion beam angle calibration and emittance measurement system for ribbon beamsFARLEY MARVIN·Filed 2009·Granted May 1, 2012·5 cites·16 claims
- 1871US10573485B1Tetrode extraction apparatus for ion sourceAXCELIS TECH INC·Filed 2018·Granted Feb 25, 2020·1 cites·20 claims
- 1971US8421039B2Method and apparatus for improved uniformity control with dynamic beam shapingEISNER EDWARD C·Filed 2011·Granted Apr 16, 2013·2 cites·11 claims
- 2067US8653486B2Method and apparatus for improved uniformity control with dynamic beam shapingAXCELIS TECH INC·Filed 2012·Granted Feb 18, 2014·1 cites·8 claims
- 2166US11037754B2Scan and corrector magnet designs for high throughput scanned beam ion implanterAXCELIS TECH INC·Filed 2019·Granted Jun 15, 2021·0 cites·20 claims
- 2263US2025299907A1Liner with raised ribs for particle transport reductionAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 2360US2025046563A1Magnetic focusing device low energy ion beamsAXCELIS TECH INC·Filed 2023·Application pending·0 cites
- 2455US8803110B2Methods for beam current modulation by ion source parameter modulationGRAF MICHAEL A·Filed 2006·Granted Aug 12, 2014·1 cites·13 claims
- 2555US7858955B2System and method of controlling broad beam uniformityAXCELIS TECH INC·Filed 2008·Granted Dec 28, 2010·0 cites·18 claims
- 2652US2010065761A1Adjustable deflection optics for ion implantationAXCELIS TECH INC·Filed 2008·Application pending·0 cites
- 2748US8378313B2Uniformity of a scanned ion beamAXCELIS TECH INC·Filed 2011·Granted Feb 19, 2013·0 cites·21 claims
- 2842US9620327B2Combined multipole magnet and dipole scanning magnetAXCELIS TECH INC·Filed 2015·Granted Apr 11, 2017·0 cites·18 claims
- 2939US2011272567A1Throughput Enhancement for Scanned Beam Ion ImplantersAXCELIS TECH INC·Filed 2010·Application pending·0 cites
- 3036US2016189917A1Systems and methods for beam angle adjustment in ion implanters with beam decelarationAXCELIS TECH INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →