Inventor · disambiguated record

Eddy Lay

Also filed as: LAY EDDY

1 granted patent·2 pending applications·0 citations·filing 2013–2022

4Inventor score

Technology areasC23C

Files withTAIWAN SEMICONDUCTOR MFG CO LTD3

Top patents by PatentIndex Score

3 records

0166US2022356570A1In-situ dry clean of tube furnaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
0258US2019093218A1In-situ dry clean of tube furnaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Application pending·0 cites
0349US9605345B2Vertical furnace for improving wafer uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Mar 28, 2017·0 cites·18 claims

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