Inventor · disambiguated record
Edward D. Macintosh
Also filed as: MACINTOSH EDWARD · MACINTOSH EDWARD D
10 granted patents·470 citations·filing 1982–2018
89Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT3VARIAN ASSOCIATES2VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2FAIRHURST JOHN ROBERT1HERTEL RICHARD1
Top patents by PatentIndex Score
10 records- 0196US4449885AWafer transfer systemVARIAN ASSOCIATES·Filed 1982·Granted May 22, 1984·183 cites·11 claims
- 0294US4836733AWafer transfer systemVARIAN ASSOCIATES·Filed 1987·Granted Jun 6, 1989·242 cites·38 claims
- 0387US7279687B2Technique for implementing a variable aperture lens in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Oct 9, 2007·11 cites·17 claims
- 0470US8746666B2Media carrierHERTEL RICHARD·Filed 2011·Granted Jun 10, 2014·4 cites·9 claims
- 0570US7109499B2Apparatus and methods for two-dimensional ion beam profilingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Sep 19, 2006·14 cites·38 claims
- 0669US7309997B1Monitor system and method for semiconductor processesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Dec 18, 2007·14 cites·19 claims
- 0764US9953849B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Apr 24, 2018·1 cites·13 claims
- 0861US9218990B2Method and apparatus for holding a plurality of substrates for processingFAIRHURST JOHN ROBERT·Filed 2011·Granted Dec 22, 2015·1 cites·14 claims
- 0955US10658207B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 19, 2020·0 cites·11 claims
- 1041US8681472B2Platen ground pin for connecting substrate to groundSUURONEN DAVID E·Filed 2009·Granted Mar 25, 2014·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →