Inventor · disambiguated record
Edward H. Payne
Also filed as: PAYNE EDWARD H
3 granted patents·76 citations·filing 1981–1991
74Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0164US4717448AReactive ion etch chemistry for providing deep vertical trenches in semiconductor substratesIBM·Filed 1986·Granted Jan 5, 1988·37 cites·18 claims
- 0263US5221425AMethod for reducing foreign matter on a wafer etched in a reactive ion etching processIBM·Filed 1991·Granted Jun 22, 1993·21 cites·11 claims
- 0345US4377633AMethods of simultaneous contact and metal lithography patterningIBM·Filed 1981·Granted Mar 22, 1983·18 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →