Inventor · disambiguated record

Emery Kuo

Also filed as: KUO EMERY · KUO EMERY Y

1 granted patent·1 pending application·7 citations·filing 2010–2012

30Inventor score

Technology areasH10P

Files withPANDIT VIRAJ S1 ZHOU CHUNMING1

Top patents by PatentIndex Score

2 records

0176US8431033B2High density plasma etchback process for advanced metallization applicationsZHOU CHUNMING·Filed 2010·Granted Apr 30, 2013·7 cites·18 claims
0219US2012211029A1Load lock assembly and method for particle reductionPANDIT VIRAJ S·Filed 2012·Application pending·0 cites

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