Inventor · disambiguated record
Eric Kurt Zwirnmann
Also filed as: ZWIRNMANN ERIC KURT
3 granted patents·1 citations·filing 2015–2018
49Inventor score
Files withVEECO PRECISION SURFACE PROC LLC3
Top patents by PatentIndex Score
3 records- 0167US10553502B2Two etch method for achieving a wafer thickness profileVEECO PRECISION SURFACE PROC LLC·Filed 2018·Granted Feb 4, 2020·1 cites·17 claims
- 0244US10026660B2Method of etching the back of a wafer to expose TSVsVEECO PRECISION SURFACE PROC LLC·Filed 2015·Granted Jul 17, 2018·0 cites·32 claims
- 0335US10446387B2Apparatus and method to control etch rate through adaptive spiking of chemistryVEECO PRECISION SURFACE PROC LLC·Filed 2017·Granted Oct 15, 2019·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →